Sapphire yog ib qho nyuaj, hnav resistant thiab muaj zog cov ntaub ntawv uas muaj ib tug siab melting kub, nws yog chemically dav inert, thiab nws qhia tau hais tias nthuav optical zog.Yog li ntawd, sapphire yog siv rau ntau yam kev siv thev naus laus zis uas cov chaw lag luam tseem ceeb yog optics thiab hluav taws xob.Niaj hnub no qhov loj tshaj plaws ntawm cov sapphire muaj nyob rau hauv lub substrate rau lub LED thiab semiconductor ntau lawm, ua raws li kev siv raws li qhov rais rau watches, mobile xov tooj qhov chaw los yog bar code scanners, rau npe ob peb piv txwv [1].Niaj hnub no, ntau txoj hauv kev los loj hlob sapphire ib leeg muaju muaj, cov ntsiab lus zoo tuaj yeem pom xws li hauv [1, 2].Txawm li cas los xij, peb txoj kev loj hlob ntawm Kyropoulos txheej txheem (KY), txoj kev sib pauv cua sov (HEM) thiab edged-txhais zaj duab xis-fed kev loj hlob (EFG) suav txog ntau dua 90% ntawm lub ntiaj teb sapphire ntau lawm.

Thawj qhov kev sim rau cov khoom siv hluavtaws tau ua xyoo 1877 rau cov pob zeb ruby ​​me me [2].Yooj yim hauv 1926 cov txheej txheem Kyropoulos tau tsim.Nws ua haujlwm hauv lub tshuab nqus tsev thiab tso cai rau tsim cov cylindrical zoo boules uas zoo heev.Lwm nthuav txoj kev loj hlob sapphire yog cov ntug-txhais zaj duab xis-piv kev loj hlob.Cov txheej txheem EFG yog ua raws li cov txheej txheem capillary uas tau ntim nrog cov kua-kua thiab tso cai rau kom loj hlob zoo li sapphire crystals xws li rods, raj lossis nplooj ntawv (tseem hu ua ribbons).Nyob rau hauv sib piv rau cov txheej txheem no lub tshav kub-hloov txoj kev, yug nyob rau hauv lub lig 1960's, tso cai rau loj hlob sapphire boules nyob rau hauv ib tug spun crucible nyob rau hauv cov duab ntawm lub crucible los ntawm txhais tau tias kub rho tawm hauv qab.Vim tias sapphire boule sticks rau lub crucible thaum kawg ntawm txoj kev loj hlob, boules tuaj yeem tawg ntawm cov txheej txheem txias thiab cov crucible tsuas yog siv tau ib zaug xwb.
Ib qho ntawm cov sapphire siv lead ua loj hlob technologies muaj nyob rau hauv ntau yam tseem ceeb Cheebtsam - tshwj xeeb tshaj yog crucibles - yog yuav tsum tau high-temperature refractory hlau.Nyob ntawm txoj kev loj hlob crucibles yog ua los ntawm molybdenum los yog tungsten, tab sis cov hlau kuj tau dav siv rau cov cua kub tsis kam, tuag-packs thiab kub-zone shieldings [1].Txawm li cas los xij, hauv daim ntawv no peb tsom peb qhov kev sib tham txog KY thiab EFG cov ncauj lus ntsig txog txij li cov khoom siv hluav taws xob tau siv rau hauv cov txheej txheem no.
Hauv tsab ntawv tshaj tawm no peb nthuav qhia cov kev tshawb fawb txog cov khoom siv thiab kev tshawb fawb ntawm qhov chaw txias ntawm cov ntaub ntawv nias-sintered xws li molybdenum (Mo), tungsten (W) thiab nws cov alloys (MoW).Hauv thawj ntu peb tsom mus rau qhov kub-kub txhua yam cov ntaub ntawv thiab ductile rau brittle hloov kub.Ntxiv rau cov khoom siv kho tshuab peb tau kawm cov khoom siv thermo-physical, piv txwv li cov coefficient ntawm thermal expansion thiab thermal conductivity.Hauv ntu thib ob peb nthuav qhia cov kev tshawb fawb ntawm cov txheej txheem txheej txheej saum npoo av tshwj xeeb txhawm rau txhim kho qhov tsis kam ntawm crucibles uas muaj alumina yaj.Hauv qhov thib peb peb tshaj tawm txog kev ntsuas ntawm cov kaum sab xis ntawm cov kua alumina ntawm cov hlau refractory ntawm 2100 ° C.Peb tau ua cov kev sim yaj-poob ntawm Mo, W thiab MoW25 alloy (75 wt.% molybdenum, 25 wt.% tungsten) thiab kawm txog kev vam khom ntawm qhov sib txawv atmospheric.Raws li qhov tshwm sim los ntawm peb qhov kev tshawb nrhiav peb tau hais tias MoW yog ib qho khoom siv nthuav dav hauv sapphire kev loj hlob technologies thiab ua lwm txoj hauv kev rau cov ntshiab molybdenum thiab tungsten.
High-temperature mechanical thiab thermo-physical zog
Txoj kev loj hlob sapphire siv lead ua KY thiab EFG nkag tau rau ntau dua 85% ntawm lub ntiaj teb sapphire kom muaj nuj nqis.Nyob rau hauv ob txoj kev, cov kua alumina yog muab tso rau hauv pressed-sintered crucibles, feem ntau yog ua los ntawm tungsten rau KY txheej txheem thiab ua los ntawm molybdenum rau EFG txheej txheem.Crucibles yog qhov tseem ceeb ntawm cov txheej txheem rau cov txheej txheem loj hlob no.aiming lub tswv yim kom txo tau cov nqi ntawm tungsten crucibles nyob rau hauv cov txheej txheem KY raws li zoo raws li nce lub neej ntawm molybdenum crucibles nyob rau hauv cov txheej txheem EFG, peb tsim thiab kuaj ntxiv ob MoW alloys, piv txwv li MoW30 muaj 70 wt.% Mo thiab 30 wt. % W thiab MoW50 muaj 50 wt.% Mo thiab W txhua.
Rau txhua qhov kev tshawb fawb txog cov khoom siv peb tau tsim cov xovxwm-sintered ingots ntawm Mo, MoW30, MoW50 thiab W. Table I qhia qhov ntom ntom thiab qhov nruab nrab ntawm cov nplej loj sib xws rau cov khoom siv thawj zaug.

Table I: Cov ntsiab lus ntawm pressed-sintered cov ntaub ntawv siv rau kev ntsuas ntawm txhua yam thiab thermo-physical zog.Lub rooj qhia qhov ntom thiab qhov nruab nrab ntawm cov nplej loj ntawm thawj lub xeev ntawm cov ntaub ntawv

Vim tias cov crucibles tau raug kub hnyiab ntev, peb tau ua cov kev ntsuas tensile zoo tshwj xeeb tshaj yog nyob rau hauv qhov kub ntawm 1000 ° C thiab 2100 ° C.Daim duab 1 qhia txog cov txiaj ntsig no rau Mo, MoW30, thiab MoW50 qhov twg 0.2% tawm lub zog (Rp0.2) thiab elongation rau pob txha (A) yog qhia.Rau kev sib piv, cov ntaub ntawv taw qhia ntawm nias-sintered W yog qhia ntawm 2100 ° C.
Rau qhov zoo tshaj plaws-soluted tungsten hauv molybdenum Rp0.2 yuav tsum nce ntxiv piv rau cov khoom Mo ntshiab.Rau qhov kub txog li 1800 ° C ob MoW alloys qhia tsawg kawg 2 zaug siab dua Rp0.2 dua rau Mo, saib daim duab 1(a).Rau qhov kub siab dua tsuas yog MoW50 qhia tau tias muaj kev txhim kho Rp0.2.Nias-sintered W qhia qhov siab tshaj Rp0.2 ntawm 2100 ° C.Cov kev ntsuam xyuas tensile tseem qhia tau A raws li qhia hauv daim duab 1(b).Ob leeg MoW alloys qhia zoo sib xws elongation rau pob txha qhov tseem ceeb uas feem ntau yog ib nrab ntawm qhov tseem ceeb ntawm Mo. Qhov siab A ntawm tungsten ntawm 2100 ° C yuav tsum tau tshwm sim los ntawm nws cov qauv zoo-grained piv rau Mo.
Txhawm rau txiav txim siab qhov ductile rau brittle hloov kub (DBTT) ntawm nias-sintered molybdenum tungsten alloys, kuj ntsuas ntawm lub kaum sab xis dabtsi yog khoov tau ua ntawm ntau yam kev ntsuas kub.Cov txiaj ntsig tau pom hauv daim duab 2. Lub DBTT nce nrog cov ntsiab lus tungsten nce.Thaum DBTT ntawm Mo yog qhov qis ntawm li 250 ° C, cov alloys MoW30 thiab MoW50 qhia DBTT ntawm kwv yees li 450 ° C thiab 550 ° C, feem.

Ntxiv rau cov yam ntxwv ntawm cov neeg kho tshuab peb kuj tau kawm txog cov khoom siv thermo-physical.Lub coefficient ntawm thermal expansion (CTE) yog ntsuas nyob rau hauv lub laub-rod dilatometer [3] nyob rau hauv ib tug kub ntawm txog 1600 ° C siv cov qauv nrog Ø5 hli thiab 25 hli ntev.Cov kev ntsuas CTE tau piav qhia hauv daim duab 3. Tag nrho cov ntaub ntawv qhia qhov zoo sib xws ntawm CTE nrog qhov kub thiab txias.Qhov CTE qhov tseem ceeb rau cov alloys MoW30 thiab MoW50 yog nyob nruab nrab ntawm qhov tseem ceeb ntawm Mo thiab W. Vim hais tias cov seem porosity ntawm cov ntaub ntawv pressed-sintered yog discontiguous thiab nrog me me tus neeg pores, cov CTE tau zoo ib yam li high-density cov ntaub ntawv xws li nplooj ntawv thiab rods [4].
Cov thermal conductivity ntawm cov ntaub ntawv pressed-sintered tau los ntawm kev ntsuas ob qho tib si thermal diffusivity thiab cov cua kub tshwj xeeb ntawm cov qauv nrog Ø12.7 hli thiab 3.5 hli thickness siv laser flash txoj kev [5, 6].Rau cov ntaub ntawv isotropic, xws li cov ntaub ntawv nias-sintered, cov cua sov tshwj xeeb tuaj yeem ntsuas nrog tib txoj kev.Kev ntsuas tau raug coj mus rau hauv qhov kub ntawm 25 ° C thiab 1000 ° C.Txhawm rau xam cov thermal conductivity peb siv ntxiv rau cov khoom siv ntom ntom raws li qhia hauv Table I thiab xav tias qhov kub thiab txias tsis txaus.Daim duab 4 qhia txog cov thermal conductivity rau pressed-sintered Mo, MoW30, MoW50 thiab W. Thermal conductivity

ntawm MoW alloys qis dua 100 W / mK rau txhua qhov ntsuas kub tau tshawb xyuas thiab ntau me dua piv rau cov ntshiab molybdenum thiab tungsten.Tsis tas li ntawd, cov conductivity ntawm Mo thiab W txo nrog qhov kub thiab txias thaum lub conductivity ntawm MoW alloy qhia txog qhov muaj nqis ntxiv nrog rau qhov kub thiab txias.
Qhov laj thawj ntawm qhov sib txawv no tsis tau tshawb xyuas hauv txoj haujlwm no thiab yuav yog ib feem ntawm kev tshawb nrhiav yav tom ntej.Nws yog lub npe hu hais tias rau cov hlau lub dominating ib feem ntawm lub thermal conductivity nyob rau hauv qis kub yog lub phonon pab thaum nyob rau hauv high temperatures lub electron gas dominates thermal conductivity [7].Phonons raug cuam tshuam los ntawm cov khoom tsis zoo thiab qhov tsis xws luag.Txawm li cas los xij, qhov nce ntawm cov thermal conductivity nyob rau hauv qhov kub tsawg yog pom tsis tau tsuas yog rau MoW alloys tab sis kuj rau lwm yam khoom-solution cov ntaub ntawv xws li tungsten-rhenium [8], qhov twg cov electron pab plays lub luag hauj lwm tseem ceeb.
Kev sib piv ntawm cov khoom siv kho tshuab thiab cov thermo-physical qhia tau hais tias MoW yog ib qho khoom siv nthuav dav rau kev siv sapphire.Rau qhov kub siab> 2000 ° C lub zog tawm los yog siab dua rau molybdenum thiab lub neej ntev ntawm crucibles yuav tsum ua tau.Txawm li cas los xij, cov khoom yuav ua rau nkig thiab kev ua haujlwm thiab tuav yuav tsum tau kho.Qhov txo qis thermal conductivity ntawm pressed-sintered MoW raws li qhia nyob rau hauv daim duab 4 qhia tau hais tias yoog raws cua sov thiab txias-down tsis nyob rau hauv lub qhov cub loj hlob tej zaum yuav tsim nyog.Tshwj xeeb tshaj yog nyob rau hauv lub tshav kub-up theem, qhov twg alumina yuav tsum tau melted nyob rau hauv lub crucible, tshav kub yog thauj tsuas yog los ntawm crucible rau nws raw khoom filling.Qhov txo qis thermal conductivity ntawm MoW yuav tsum tau txiav txim siab kom tsis txhob muaj kev ntxhov siab thermal hauv crucible.Qhov ntau ntawm CTE qhov tseem ceeb ntawm MoW alloys yog qhov nthuav hauv cov ntsiab lus ntawm HEM siv lead ua txoj kev loj hlob.Raws li tau tham hauv kev siv [9] CTE ntawm Mo yog ua rau lub clamping ntawm sapphire nyob rau hauv lub txias txias theem.Yog li ntawd, qhov txo qis CTE ntawm MoW alloy tej zaum yuav yog tus yuam sij kom paub txog rov siv tau spun crucibles rau cov txheej txheem HEM.
Deg txias ntawm pressed-sintered refractory hlau
Raws li tau tham nyob rau hauv cov lus qhia, nias-sintered crucibles feem ntau yog siv nyob rau hauv sapphire siv lead ua kev loj hlob txheej txheem kom sov thiab ua kom cov alumina yaj me ntsis saum 2050 ° C.Ib qho tseem ceeb yuav tsum tau rau qhov kawg sapphire siv lead ua zoo yog kom impurities thiab gas npuas nyob rau hauv lub yaj kom tsawg li sai tau.Pressed-sintered qhov chaw muaj qhov seem porosity thiab qhia cov qauv zoo-grained.Qhov zoo-grained qauv nrog kaw porosity yog tsis yooj yim rau txhim kho corrosion ntawm cov hlau tshwj xeeb tshaj yog los ntawm oxidic melts.Lwm qhov teeb meem rau sapphire muaju yog cov pa roj me me hauv cov yaj.Qhov tsim ntawm cov pa npuas yog kho kom zoo dua los ntawm kev nce qhov roughness ntawm qhov refractory uas yog nyob rau hauv kev sib cuag nrog cov yaj.

Txhawm rau kov yeej cov teeb meem ntawm cov ntaub ntawv pressed-sintered peb siv kev kho tshuab deg.Peb tau sim cov txheej txheem nrog lub cuab yeej nias qhov twg cov cuab yeej ceramic ua haujlwm ntawm qhov chaw nyob rau hauv lub siab txhais ntawm ib qho nias-sintered ib feem [10].Qhov zoo ntawm kev ntxhov siab nyob rau saum npoo yog inversely nyob ntawm qhov chaw sib cuag ntawm cov cuab yeej ceramic thaum lub caij ntuj no txias.Nrog rau qhov kev kho mob no muaj kev ntxhov siab hauv zos tuaj yeem siv rau hauv cheeb tsam ntawm cov ntaub ntawv pressed-sintered thiab cov khoom nto yog plastically deformed.Daim duab 5 qhia tau hais tias ib qho piv txwv ntawm ib tug pressed-sintered molybdenum specimen uas tau ua hauj lwm nrog cov txheej txheem no.
Daim duab 6 qhia tau hais tias muaj txiaj ntsig zoo ntawm qhov kev cia siab ntawm kev siv zog nias ntawm lub cuab yeej siab.Cov ntaub ntawv tau muab los ntawm kev ntsuas ntawm static imprints ntawm lub cuab tam nyob rau hauv pressed-sintered molybdenum.Cov kab sawv cev rau qhov haum rau cov ntaub ntawv raws li peb cov qauv.

Daim duab 7 qhia tau hais tias cov txiaj ntsig kev soj ntsuam tau sau tseg rau qhov roughness ntawm qhov chaw thiab qhov chaw hardness ntsuas raws li kev ua haujlwm ntawm lub cuab yeej siab rau ntau yam khoom siv pressed-sintered npaj ua disks.Raws li pom nyob rau hauv daim duab 7(a) kev kho mob tshwm sim nyob rau hauv ib tug hardening ntawm nto.Lub hardness ntawm ob qho tib si kuaj cov ntaub ntawv Mo thiab MoW30 yog nce li ntawm 150%.Rau cov cuab yeej siab siab lub hardness tsis yog ntxiv.Daim duab 7(b) qhia tau hais tias qhov chaw du heev nrog Ra tsawg li 0.1 μm rau Mo yog ua tau.Rau cov cuab yeej nce siab qhov roughness ntawm Mo nce ntxiv.Vim tias MoW30 (thiab W) yog cov ntaub ntawv nyuaj dua Mo, qhov txiaj ntsig Ra ntawm MoW30 thiab W feem ntau 2-3 npaug siab dua Mo. kuaj parameter ntau yam.
Peb cov kev tshawb fawb txog electron microscopy (SEM) ntawm cov chaw txias kom paub meej cov ntaub ntawv ntawm qhov roughness, saib daim duab 7(b).Raws li tau piav qhia hauv daim duab 8(a), tshwj xeeb tshaj yog cov cuab yeej siab siab tuaj yeem ua rau cov nplej puas thiab microcracks.Kev txias txias ntawm qhov chaw siab heev tuaj yeem ua rau txawm tias cov nplej tshem tawm ntawm qhov chaw, saib daim duab 8(b).Cov teebmeem zoo sib xws kuj tuaj yeem pom rau MoW thiab W ntawm qee qhov kev ua haujlwm tsis zoo.
Txhawm rau kawm txog cov txiaj ntsig ntawm cov txheej txheem txheej txheej saum npoo av hais txog cov qauv ntawm cov nplej thiab nws tus cwj pwm kub, peb tau npaj cov qauv annealing los ntawm peb qhov kev sim disks ntawm Mo, MoW30 thiab W.

Cov qauv raug kho rau 2 teev ntawm qhov ntsuas kub sib txawv hauv thaj tsam 800 ° C txog 2000 ° C thiab cov kab mob me me tau npaj rau kev tsom xam lub teeb pom kev zoo.
Daim duab 9 qhia microsection piv txwv ntawm nias-sintered molybdenum.Thawj lub xeev ntawm qhov chaw kho mob tau nthuav tawm hauv daim duab 9(a).Lub saum npoo qhia ib qho yuav luag cov txheej ntom ntom nyob rau thaj tsam li 200 μm.Hauv qab no cov txheej txheem ib txwm siv nrog sintering pores pom, qhov seem porosity yog li 5%.Qhov ntsuas seem porosity nyob rau hauv cov txheej saum npoo yog zoo hauv qab 1%.Daim duab 9(b) qhia cov qauv nplej tom qab annealing rau 2 h ntawm 1700 ° C.Lub thickness ntawm qhov ntom ntom txheej tau nce thiab cov nplej yog qhov loj dua li cov nplej hauv ntim tsis hloov kho los ntawm qhov chaw txias.Qhov no coarse-grained heev ntom txheej yuav ua tau zoo los txhim kho cov creep kuj ntawm cov khoom.
Peb tau kawm txog qhov kub thiab txias nyob ntawm txheej txheej nrog rau cov thickness thiab cov lis loj rau ntau yam cuab yeej pressures.Daim duab 10 qhia cov piv txwv piv txwv rau txheej txheej txheej rau Mo thiab MoW30.Raws li pom nyob rau hauv daim duab 10(a) thawj txheej txheej thickness nyob ntawm lub machining cuab tam teeb.Ntawm qhov kub ntawm qhov kub siab tshaj 800 ° C, qhov saum npoo txheej thickness ntawm Mo pib nce.Thaum 2000 ° C, txheej thickness ncav cuag qhov tseem ceeb ntawm 0.3 mus rau 0.7 hli.Rau MoW30 qhov nce ntawm txheej txheej txheej tuaj yeem pom tsuas yog rau qhov kub siab tshaj 1500 ° C raws li pom hauv daim duab 10(b).Txawm li cas los xij ntawm 2000 ° C txheej thickness ntawm MoW30 zoo ib yam li Mo.

Zoo li cov thickness tsom xam ntawm txheej txheej saum npoo, Daim duab 11 qhia cov ntaub ntawv nruab nrab ntawm cov nplej loj rau Mo thiab MoW30 ntsuas hauv cov txheej txheej saum npoo raws li kev ua haujlwm ntawm qhov kub thiab txias.Raws li tuaj yeem pom los ntawm cov duab, qhov loj ntawm cov nplej yog - nyob rau hauv qhov ntsuas tsis paub meej - tsis muaj kev ywj pheej ntawm kev teeb tsa parameter.Kev loj hlob ntawm cov qoob loo qhia tau hais tias kev loj hlob ntawm cov qoob loo tsis zoo ntawm txheej txheej los ntawm qhov deformation ntawm thaj chaw saum npoo.Molybdenum nplej loj hlob ntawm qhov ntsuas kub siab tshaj 1100 ° C thiab cov qoob loo loj yuav luag 3 zaug loj dua ntawm 2000 ° C piv rau thawj cov qoob loo loj.MoW30 nplej ntawm txheej txheej txheej txheej pib loj hlob saum qhov kub ntawm 1500 ° C.Nyob rau ntawm qhov ntsuas kub ntawm 2000 ° C qhov nruab nrab ntawm cov nplej loj yog li 2 npaug ntawm qhov loj me me.
Hauv cov ntsiab lus, peb cov kev tshawb fawb ntawm cov txheej txheem txheej txheej saum npoo tau pom tias nws yog qhov zoo rau kev nias-sintered molybdenum tungsten alloys.Siv txoj kev no, qhov chaw uas muaj zog ntxiv nrog rau qhov chaw du nrog Ra zoo hauv qab 0.5 μm tuaj yeem tau.Cov cuab yeej tom kawg yog qhov tshwj xeeb rau kev txo cov npuas npuas.Qhov seem porosity nyob rau hauv txheej txheej yog ze rau xoom.Annealing thiab microsection cov kev tshawb fawb qhia tau hais tias ib tug heev ntom txheej txheej nrog ib tug tuab tuab ntawm 500 μm yuav tau.Ntawm no lub machining parameter tuaj yeem tswj cov txheej thickness.Thaum nthuav tawm cov khoom siv rau qhov kub thiab txias raws li feem ntau siv rau hauv txoj kev loj hlob sapphire, txheej txheej txheej ua ntxhib-grained nrog cov nplej loj 2-3 npaug loj dua yam tsis muaj qhov chaw machining.Lub grain loj nyob rau hauv txheej txheej yog ywj siab ntawm machining tsis.Tus naj npawb ntawm cov ciam teb ntawm qhov chaw yog txo kom zoo.Qhov no ua rau muaj kev tiv thaiv ntau dua tiv thaiv kev sib kis ntawm cov ntsiab lus raws li cov ciam teb nplej thiab cov yaj tawm tsam qis dua.Tsis tas li ntawd, qhov kub siab creep kuj ntawm pressed-sintered molybdenum tungsten alloys yog txhim kho.

Kev tshawb nrhiav ntub dej ntawm cov kua alumina ntawm cov hlau refractory
Kev ntub dej ntawm cov kua alumina ntawm molybdenum lossis tungsten yog qhov tseem ceeb hauv kev lag luam sapphire.Tshwj xeeb tshaj yog rau cov txheej txheem EFG cov alumina wetting tus cwj pwm nyob rau hauv tuag-pob capillaries txiav txim qhov kev loj hlob ntawm sapphire rods los yog ribbons.Txhawm rau nkag siab txog qhov cuam tshuam ntawm cov khoom xaiv, qhov chaw roughness lossis txheej txheem huab cua peb tau ua cov kev ntsuas lub kaum ntse ntse kom ntxaws [11].
Rau kev ntsuas dej ntsuas cov substrates nrog qhov loj ntawm 1 x 5 x 40 mm³ tau tsim los ntawm Mo, MoW25 thiab W cov ntaub ntawv.Los ntawm kev xa cov hluav taws xob siab dhau los ntawm cov ntawv hlau substrate lub melting kub ntawm alumina ntawm 2050 ° C tuaj yeem ua tiav hauv ib nrab feeb.Rau lub kaum sab xis ntsuas me me alumina hais tau muab tso rau saum cov ntawv kuaj thiab tom qab ntawd

melted rau hauv cov dej.Ib qho kev ntsuas kev siv tshuab tau sau cov dej ntws tawm raws li qhov piv txwv hauv daim duab 12. Txhua qhov kev sim yaj-poob tso cai rau ntsuas lub kaum sab xis los ntawm kev txheeb xyuas cov tee dej contour, saib daim duab 12(a), thiab cov txheej txheem substrate feem ntau tsis ntev tom qab tso tawm. cua sov tam sim no, saib daim duab 12(b).
Peb tau ntsuas lub kaum sab xis rau ob qhov chaw sib txawv, lub tshuab nqus tsev ntawm 10-5mbar thiab argon ntawm 900 mbar siab.Tsis tas li ntawd, ob hom saum npoo tau sim, piv txwv li cov nplais ntxhib nrog Ra ~ 1 μm thiab du nto nrog Ra ~ 0.1 μm.
Table II qhia txog cov txiaj ntsig ntawm txhua qhov kev ntsuas ntawm cov ces kaum ntub dej rau Mo, MoW25 thiab W rau qhov chaw du.Feem ntau, lub kaum sab xis ntub dej ntawm Mo yog qhov tsawg tshaj plaws piv rau lwm cov ntaub ntawv.Qhov no txhais tau hais tias alumina yaj yog ntub dej Mo zoo tshaj plaws uas muaj txiaj ntsig zoo hauv EFG cov txheej txheem loj hlob.Cov ces kaum ntub dej tau txais rau argon yog qhov qis dua cov ces kaum rau lub tshuab nqus tsev.Rau qhov ntxhib substrate nto peb pom systematically me ntsis qis wetting ces kaum.Cov txiaj ntsig no feem ntau yog kwv yees li 2 ° qis dua lub kaum sab xis muab rau hauv Table II.Txawm li cas los xij, vim qhov ntsuas tsis meej, tsis muaj qhov sib txawv ntawm lub kaum ntse ntse ntawm qhov chaw du thiab ntxhib tuaj yeem raug tshaj tawm.

Peb ntsuas cov ces kaum ntub dej kuj rau lwm qhov cua siab, piv txwv li qhov tseem ceeb ntawm 10-5 mbar thiab 900 mbar.Qhov kev soj ntsuam ua ntej qhia tau hais tias rau kev ntxhov siab ntawm 10-5 mbar thiab 1 mbar tus tubtxib saum ntuj wetting tsis hloov.Tsuas yog saum toj no 1 mbar lub wetting lub kaum sab xis ua qis dua pom ntawm 900 mbar argon (Table II).Ib sab ntawm cov huab cua, lwm qhov tseem ceeb rau kev coj tus cwj pwm ntub dej ntawm alumina yaj yog cov pa oxygen ib nrab siab.Peb cov kev ntsuam xyuas qhia tias kev sib cuam tshuam ntawm cov yaj thiab cov hlau substrates tshwm sim nyob rau hauv lub sijhawm ntsuas tiav (feem ntau yog 1 feeb).Peb xav tias dissolving txheej txheem ntawm Al2O3 molecules rau hauv lwm yam pa oxygen Cheebtsam uas cuam tshuam nrog substrate cov ntaub ntawv nyob ze ntawm lub yaj droplet.Cov kev tshawb fawb ntxiv tam sim no tseem tab tom tshawb nrhiav kom ntxaws ntxiv ob qho tib si lub siab nyob ntawm lub kaum sab xis ntub dej thiab cov tshuaj lom neeg sib cuam tshuam ntawm cov yaj nrog cov hlau refractory.