TZM polished electrode rod used in the semiconductor industry
TZM electrode is a high-end electrode material made of special molybdenum based alloy (Mo-0.5Ti-0.08Zr), specially developed for extreme working conditions. Its unique alloy formula endows the product with excellent high-temperature stability, and it can maintain excellent structural integrity and functionality even in a high temperature environment of 1600 ℃. It is an upgraded product of traditional electrode materials.
Main components |
Mo: Margin Ti≥0.45% Zr≥0.08% |
Impurity content≤ |
|
Pb |
0.0005 |
Fe |
0.0020 |
S |
0.0050 |
P |
0.0005 |
C |
0.01 |
Cr |
0.0010 |
Al |
0.0015 |
Cu |
0.0015 |
K |
0.0080 |
N |
0.003 |
Sn |
0.0015 |
Si |
0.0020 |
Ca |
0.0015 |
Na |
0.0020 |
O |
0.008 |
Ti |
0.0010 |
Mg |
0.0010 |
1. Our factory is located in Luoyang City, Henan Province. Luoyang is a production area for tungsten and molybdenum mines, so we have absolute advantages in quality and price;
2. Our company has technical personnel with over 15 years of experience, and we provide targeted solutions and suggestions for each customer's needs.
3. All of our products undergo strict quality inspection before being exported.
4. If you receive defective goods, you can contact us for a refund.

1. Raw material preparation
2.Sinter
3. Hot-work
4. Machining
5. Heat treatment
6. Quality Inspection
1. High temperature structural materials: used for manufacturing high-temperature structural components, such as furnace heating rods, guide rods, electrodes, etc.
2. Die casting molds and cores: Widely used in die casting molds and cores for aluminum and copper alloys, cast iron and iron-based alloys.
3. Hot extrusion tool: Used for hot extrusion tools of stainless steel and other metals, as well as plugs for seamless steel pipe hot processing.
4. Aerospace components: Components used in space rocket systems and spacecraft.







Use diamond or CBN cutting tools for low-speed cutting (<50m/min).
Adopting ultrasonic vibration assisted machining (reducing cutting force).
Annealing (1000 ° C/1h) after processing to relieve stress.
Use cutting fluid for cooling during processing.
Acid washing (HF+HNO ∝ mixture) to remove the oxide layer.
Store in an inert atmosphere (such as Ar) or vacuum packaging.
Avoid rapid heating/cooling (recommended heating rate<10 ° C/min).
Adopting a stepped heating method (such as preheating to 500 ° C and then raising to the target temperature).