TZM polished electrode rod used in the semiconductor industry
TZM electrode is a high-performance refractory metal electrode material based on molybdenum (Mo) and reinforced by adding a small amount of titanium (Ti), zirconium (Zr), and carbon (C) elements. Simply put, you can understand it as a comprehensive upgraded version of pure molybdenum electrodes. It retains the advantages of molybdenum and greatly improves high-temperature performance through alloying.
| Main components |
Mo: Margin Ti≥0.45% Zr≥0.08% |
|
Impurity content≤ |
|
|
Pb |
0.0005 |
|
Fe |
0.0020 |
|
S |
0.0050 |
|
P |
0.0005 |
|
C |
0.01 |
|
Cr |
0.0010 |
|
Al |
0.0015 |
|
Cu |
0.0015 |
|
K |
0.0080 |
|
N |
0.003 |
|
Sn |
0.0015 |
|
Si |
0.0020 |
|
Ca |
0.0015 |
|
Na |
0.0020 |
|
O |
0.008 |
|
Ti |
0.0010 |
|
Mg |
0.0010 |
1. Our factory is located in Luoyang City, Henan Province. Luoyang is a production area for tungsten and molybdenum mines, so we have absolute advantages in quality and price;
2. Our company has technical personnel with over 15 years of experience, and we provide targeted solutions and suggestions for each customer's needs.
3. All of our products undergo strict quality inspection before being exported.
4. If you receive defective goods, you can contact us for a refund.
1. Raw material preparation
2.Sinter
3. Hot-work
4. Machining
5. Heat treatment
6. Quality Inspection
Vacuum arc melting: used as a consumable electrode for producing high-purity active metals such as titanium and zirconium. The extremely low evaporation rate of TZM in vacuum can effectively avoid contaminating the melted metal.
Glass melting furnace: used as a through wall electrode, directly inserted into high-temperature glass liquid for electrical heating. TZM has good corrosion resistance and dimensional stability in molten glass.
Hot runner system: used for high-temperature hot runner nozzles in injection molding machines and other equipment, requiring strength and conductivity to be maintained during long-term thermal cycling at 800-1300 ° C.
High temperature furnaces and vacuum equipment: as conductive components for high-temperature heaters, anode targets for X-ray tubes, and various supports or connectors that require high temperature resistance and good conductivity.
Aerospace: Certain high-temperature structural components and conductive heat transfer parts used in rocket engines.
Use diamond or CBN cutting tools for low-speed cutting (<50m/min).
Adopting ultrasonic vibration assisted machining (reducing cutting force).
Annealing (1000 ° C/1h) after processing to relieve stress.
Use cutting fluid for cooling during processing.
Acid washing (HF+HNO ∝ mixture) to remove the oxide layer.
Store in an inert atmosphere (such as Ar) or vacuum packaging.
Avoid rapid heating/cooling (recommended heating rate<10 ° C/min).
Adopting a stepped heating method (such as preheating to 500 ° C and then raising to the target temperature).
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