Ho na le beam e tebileng ea ion ea moea ka har'a thepa e tiileng, beam ea ion ho ea ho liathomo tse tiileng kapa limolek'hule sebakeng se tiileng sa thepa, ketsahalo ena e bitsoa ion beam sputtering;'me ha thepa e tiileng, bokaholimo ba lintho tse tiileng bo khutlela morao, kapa ka ntle ho thepa e tiileng ho ea ho liketsahalo tsena ho bitsoa ho hasana;ho na le ketsahalo e 'ngoe ke hore ka mor'a hore sefate sa ion se be le thepa e tiileng ka thepa e tiileng le ho fokotsa khanyetso butle-butle,' me qetellong e lule e le lisebelisoa tse tiileng, ketsahalo ena e bitsoa ion implantation.
Mokhoa oa ho kenya ion:
Ke mofuta oa theknoloji ea phetoho ea lintho tse bonahalang e tsoetseng pele ka potlako le e sebelisoang haholo lefatšeng lilemong tse 30 tse fetileng.Molao-motheo oa mantlha ke ho sebelisa matla a ketsahalo ea beam ea ion ho ea ka tatellano ea 100keV ho ion beam mme lisebelisoa tsa liathomo kapa limolek'hule e tla ba letoto la litšebelisano tsa 'mele le lik'hemik'hale, tahlehelo ea matla ea ion butle butle, setopo sa ho qetela. lintho tse bonahalang, 'me etsa hore sebopeho le thepa ea sebopeho bokaholimo, fetoha.E le hore ho optimize holim'a thepa thepa, kapa ho fumana ba bang ba thepa e ncha.Theknoloji e ncha ka lebaka la melemo ea eona e ikhethang, e 'nile ea e-ba thepa ea semiconductor ea doped, tšepe, ceramic, polymer, phetoho ea holim'a metsi e sebelisoa haholo, e fihletse melemo e mengata ea moruo le ea sechaba.
Ho kenngoa ha ion joalo ka theknoloji ea bohlokoa ea doping ho thekenoloji e nyane ea elektroniki e bapala karolo ea bohlokoa ho ntlafatseng thepa e kaholimo ea lisebelisoa.Theknoloji ea ho kenngoa ha ion ke ts'ebetso e phahameng haholo ea mocheso le ho hanyetsa lik'hemik'hale tse hanyetsang ho bola ha thepa.Ka hona, likarolo tse kholo tsa kamore ea ionization li entsoe ka tungsten, molybdenum kapa lisebelisoa tsa graphite.Lilemo tsa Gemei tsa lipatlisiso le tlhahiso ea indasteri ka ho kenngoa ha ion ea thepa ea tungsten molybdenum, ts'ebetso ea tlhahiso e na le boiphihlelo bo tsitsitseng le bo ruileng.
Lihlahisoa tse chesang tsa Ion Implantation
