Pali lalikulu mpweya ion mtengo mu zinthu olimba, ion mtengo kuti olimba zinthu maatomu kapena mamolekyu kukhala olimba zinthu pamwamba, chodabwitsa amatchedwa ion mtengo sputtering; ndipo pamene zinthu zolimba, pamwamba pa zinthu zolimba zimabwereranso, kapena kuchokera ku zinthu zolimba kupita ku zochitika izi zimatchedwa kumwazikana; pali chodabwitsa china ndi chakuti pambuyo pa mtengo wa ion ku chinthu cholimba ndi zinthu zolimba ndikuchepetsa kukana pang'onopang'ono pansi, ndipo pamapeto pake kukhalabe muzinthu zolimba, chodabwitsa ichi chimatchedwa ion implantation.
Njira ya ion implantation:
Ndi mtundu waukadaulo wosintha zinthu padziko lapansi womwe wakula mwachangu komanso wogwiritsidwa ntchito kwambiri padziko lonse lapansi zaka 30 zapitazi. Mfundo yofunikira ndikugwiritsa ntchito mphamvu ya ion mtengo wa 100keV ku mtengo wa ion ndipo zida za maatomu kapena mamolekyu zidzakhala mndandanda wa zochitika zakuthupi ndi zamankhwala, kuwonongeka kwa mphamvu ya ion pang'onopang'ono, kuyimitsidwa komaliza pazinthuzo, ndikupangitsa kapangidwe ndi katundu wa zinthu zakuthupi, kusintha. Kuti konza pamwamba zimatha zipangizo, kapena kupeza zatsopano katundu. Ukadaulo watsopano chifukwa cha zabwino zake zapadera, wakhala mu doped semiconductor zakuthupi, zitsulo, ceramic, polima, kusinthidwa kwapamwamba kumagwiritsidwa ntchito kwambiri, kwapindula kwambiri pazachuma komanso chikhalidwe.
Kuyika kwa ion ngati ukadaulo wofunikira wa doping muukadaulo wamagetsi wamagetsi umakhala ndi gawo lofunikira pakukhathamiritsa kwapamwamba kwa zida. Ukadaulo wa implantation wa ion ndiwokwera kwambiri kutentha komanso kukana kukana kwa dzimbiri kwa zinthu. Choncho, mbali zazikulu za chipinda cha ionization zimapangidwa ndi tungsten, molybdenum kapena graphite zipangizo. Zaka za Gemei za kafukufuku wamakampani ndi kupanga ndi ion implantation ya tungsten molybdenum zakuthupi, kupanga kumakhala kokhazikika komanso kolemera.
Zogulitsa Zotentha za Ion Implantation
