Kukho umqadi we-ion womoya onzima ojika ube yinto eqinileyo, umqadi we-ion uye kwiiathom okanye iimolekyuli zibe ngumphezulu wezinto eziqinileyo, le nto ibizwa ngokuba yi-ion beam sputtering; kwaye xa izinto eziqinileyo, umphezulu wezinto eziqinileyo ubuyela umva, okanye uphuma kwizinto eziqinileyo uye kwezi zinto zibizwa ngokuba yi-scattering; kukho enye into yokuba emva kokuba umqadi we-ion uye kwizinto eziqinileyo ujika ube yinto eqinileyo uze unciphise ukumelana kancinci, kwaye ekugqibeleni uhlale kwizinto eziqinileyo, le nto ibizwa ngokuba yi-ion implantation.
Indlela yokufaka i-ion:
Luhlobo lobuchwepheshe bokuguqula umphezulu wezinto ezisetyenzisiweyo oluphuhliswe ngokukhawuleza nangokubanzi kwihlabathi liphela kwiminyaka engama-30 idlulileyo. Umgaqo osisiseko kukusebenzisa amandla e-ion beam incident ukuya kumyalelo wezinto ze-100keV ukuya kwi-ion beam kwaye izinto zeathom okanye iimolekyuli ziya kuba luchungechunge lwentsebenziswano yezinto ezisebenza ngokwasemzimbeni nangokwekhemikhali, incident incident ilahleko yamandla e-ion incident kancinci kancinci, isiphelo sokugqibela sezinto ezisetyenziswayo, kwaye sibangele utshintsho kwisakhiwo kunye neempawu zokwakheka komphezulu wezinto ezisetyenziswayo. Ukuze kuphuculwe iipropati zomphezulu wezinto ezisetyenziswayo, okanye kufumaneke ezinye iipropati ezintsha. Ngenxa yeenzuzo zayo ezikhethekileyo, iteknoloji entsha iye yasetyenziswa kakhulu kwizinto ezisetyenziswa ngokwemichiza ye-semiconductor, isinyithi, i-ceramic, i-polymer, i-surface modification isetyenziswa kakhulu, ifumene iingenelo ezinkulu kwezoqoqosho nakwezentlalo.
Ukufakelwa kwe-ion njengeteknoloji ebalulekileyo yokusetyenziswa kwe-doping kwitekhnoloji ye-micro electronic kudlala indima ephambili ekwenzeni ngcono iipropati zomphezulu wezinto. Itekhnoloji yokufakelwa kwe-ion isebenza kakhulu kubushushu obuphezulu kunye nokumelana nokugqwala kweekhemikhali kwezinto. Ke ngoko, iindawo eziphambili zegumbi le-ionization zenziwe ngezinto ze-tungsten, i-molybdenum okanye i-graphite. Iminyaka emininzi yophando lweshishini kunye nemveliso ngokufakelwa kwe-ion kwezinto ze-tungsten molybdenum, inkqubo yemveliso inamava azinzileyo natyebileyo.
Iimveliso ezishushu zokufakelwa kwe-Ion
